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Browsing by Author "Ünal, Nezih"

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    Experimental and simulation comparison of electron beam proximity correction

    Leunissen, Peter
    ;
    Jonckheere, Rik  
    ;
    Hofmann, Uli
    ;
    Ünal, Nezih
    ;
    Kalus, Christian
    Journal article
    2004, Journal of Vacuum Science and Technology B, (22) 6, p.2943-2947

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