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Experimental and simulation comparison of electron beam proximity correction
Publication:
Experimental and simulation comparison of electron beam proximity correction
Date
2004
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Leunissen, Peter
;
Jonckheere, Rik
;
Hofmann, Uli
;
Ünal, Nezih
;
Kalus, Christian
Journal
Journal of Vacuum Science and Technology B
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1810
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Acq. date: 2025-11-01
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Views
1810
since deposited on 2021-10-15
1
last week
Acq. date: 2025-11-01
Citations