Browsing by Author "Abdel Aziz, Ahmed"
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Publication Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C
Proceedings paper2011, Micromechanical Systems - Materials and Devices IV, 29/11/2010, p.mrsf10-1299-s02-Publication Contact resistivity of laser annealed SiGe for MEMS structural layers deposited at 210C
Meeting abstract2010, MRS Fall Meeting Symposium S: Micromechanical Systems - Materials and Devices IV, 29/11/2010, p.S2.5Publication Harsh laser annealing techniques for improved crystallization of a-Si(Ge) layers deposited at 210C
Proceedings paper2009, Annual Workshop on Semiconductor Advances for Future Electronics - SAFE, 26/11/2009, p.63-66Publication Selective laser annealing for improved SiGe MEMS structural layers at 210°C
Proceedings paper2010, 23rd IEEE International Conference on Micro Electro Mechanical Systems - MEMS, 24/01/2010, p.324-327