Repository logo Institutional repository
  • Communities & Collections
  • Scientific publicationsOpen knowledge
Search repository
High contrast
  1. Home
  2. Browse by Author

Browsing by Author "Abdelghany, Hesham"

Filter results by typing the first few letters
Now showing 1 - 1 of 1
  • Results per page
  • Sort Options
  • Loading...
    Thumbnail Image
    Publication

    Co-Optimized Double-Exposure Stitching with ILT to Maximize High-NA EUV Process Window

    Dam, Thuc
    ;
    Painter, Benjamin
    ;
    Taneja, Ankur
    ;
    Selinidis, Kosta
    ;
    Abdelghany, Hesham
    ;
    Zhou, Xiangyu
    Proceedings paper
    2026, DTCO and Computational Patterning V, 2026-02-22, p.139800G

Follow imec on

VimeoLinkedInFacebook

The repository

  • Contact us
  • Policy
  • About imec
Privacy statement | Cookie settings