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Browsing by Author "Abell, T."

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    Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity

    Travaly, Youssef
    ;
    Schuhmacher, J.
    ;
    Martin Hoyas, Ana
    ;
    Abell, T.
    ;
    Sutcliffe, Vic
    ;
    Jonas, M.
    Journal article
    2005, Microelectronic Engineering, (82) 3_4, p.639-644

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