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Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity

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1913 since deposited on 2021-10-16
6last month
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Acq. date: 2026-04-28

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1913 since deposited on 2021-10-16
6last month
3last week
Acq. date: 2026-04-28

Citations