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Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity
Publication:
Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity
Date
2005
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Travaly, Youssef
;
Schuhmacher, J.
;
Martin Hoyas, Ana
;
Abell, T.
;
Sutcliffe, Vic
;
Jonas, M.
;
Van Hove, Marleen
;
Maex, Karen
Journal
Microelectronic Engineering
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1903
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1903
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations