Publication:
Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity
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1909 since deposited on 2021-10-16
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Acq. date: 2026-04-07
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1909 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2026-04-07
Citations