Publication:
Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity
Date
| cris.virtual.department | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtual.orcid | #PLACEHOLDER_PARENT_METADATA_VALUE# | |
| cris.virtualsource.department | bb9c66a8-60a0-4f4b-9c7c-d1ca7e7f5571 | |
| cris.virtualsource.orcid | bb9c66a8-60a0-4f4b-9c7c-d1ca7e7f5571 | |
| dc.contributor.author | Travaly, Youssef | |
| dc.contributor.author | Schuhmacher, J. | |
| dc.contributor.author | Martin Hoyas, Ana | |
| dc.contributor.author | Abell, Thomas | |
| dc.contributor.author | Sutcliffe, Vic | |
| dc.contributor.author | Jonas, M. | |
| dc.contributor.author | Van Hove, Marleen | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-16T05:46:48Z | |
| dc.date.available | 2021-10-16T05:46:48Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11330 | |
| dc.source.beginpage | 639 | |
| dc.source.endpage | 644 | |
| dc.source.issue | 3_4 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 82 | |
| dc.title | Characterization of atomic layer deposited nanoscale structure on dense dielectric substrates by X-ray reflectivity | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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