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Browsing by Author "Aboy, M."

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    Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices

    Pelaz, L.
    ;
    Duffy, Ray
    ;
    Aboy, M.
    ;
    Marques, L.
    ;
    Lopez, P.
    ;
    Santos, I.
    ;
    Pawlak, Bartek  
    ;
    Van Dal, Mark  
    Proceedings paper
    2008, IEEE International Electron Devices Meeting - IEDM, 15/12/2008, p.535-538
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    Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate

    Pawlak, Bartek  
    ;
    Duffy, Ray
    ;
    Janssens, Tom
    ;
    Vandervorst, Wilfried  
    ;
    Severi, Simone  
    Proceedings paper
    2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.43-49

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