Browsing by Author "Aboy, M."
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Publication Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices
Proceedings paper2008, IEEE International Electron Devices Meeting - IEDM, 15/12/2008, p.535-538Publication Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate
Proceedings paper2005, Advanced Gate Stack, Source/Drain, and Channel Engineering for Si-based CMOS: New Materials, Processes, and Equipment, 15/05/2005, p.43-49