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Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate
Publication:
Effect of amorphization on activation and deactivation of boron in source/drain, channel and poly gate
Date
2005
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pawlak, Bartek
;
Duffy, Ray
;
Janssens, Tom
;
Vandervorst, Wilfried
;
Severi, Simone
;
Richard, Olivier
;
Benedetti, Alessandro
;
Eyben, Pierre
;
Colombeau, B.
;
Cowern, N.E.B.
;
Camillo-Castillo, R.A.
;
Jones, K.S.
;
Aboy, M.
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2003
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
2003
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations