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Browsing by Author "Abramovitz, Yaniv"

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    Recess metrology challenges for 3D device architectures in advanced technology nodes

    Santoro, Gaetano
    ;
    Houchens, Kevin
    ;
    Bogdanowicz, Janusz  
    ;
    Elizov, Moshe
    ;
    Yaron, Lior
    Proceedings paper
    2022, Conference on Metrology, Inspection, and Process Control XXXVI Part of SPIE Advanced Lithography and Patterning Conference, FEB 24-MAY 27, 2022, p.120530L

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