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Browsing by Author "Ackermann, Marcelo D."

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    The interface study of photoresist/underlayer using hybrid x-ray reflectivity and x-ray standing wave approach

    Tiwari, Atul
    ;
    Fallica, Roberto  
    ;
    Ackermann, Marcelo D.
    ;
    Makhotkin, Igor A.
    Proceedings paper
    2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.1295505

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