Publication:
The interface study of photoresist/underlayer using hybrid x-ray reflectivity and x-ray standing wave approach
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Acq. date: 2026-04-06
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324 since deposited on 2024-06-15
31last month
5last week
Acq. date: 2026-04-06
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621 since deposited on 2024-06-15
3last month
Acq. date: 2026-04-06
Citations