Publication:
The interface study of photoresist/underlayer using hybrid x-ray reflectivity and x-ray standing wave approach
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Acq. date: 2026-02-26
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285 since deposited on 2024-06-15
27last month
7last week
Acq. date: 2026-02-26
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618 since deposited on 2024-06-15
Acq. date: 2026-02-26
Citations