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Browsing by Author "Adel, Michael E."

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    Stack and topography verification as an enabler for computational metrology target design

    Adel, Michael E.
    ;
    Tarshish-Shapir, Inna
    ;
    Gready, David
    ;
    Ghinovker, Mark
    ;
    Dror, Chen
    Proceedings paper
    2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.94240D
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    Via to line-end contact failures: the role of stochastics

    Baskaran, Balakumar  
    ;
    Cerbu, Dorin  
    ;
    Beggiato, Matteo  
    ;
    Blanco, Victor  
    ;
    Lorusso, Gian  
    Proceedings paper
    2025, 2025 Conference on Metrology Inspection and Process Control-Annual, 2025-02-24, p.134260N-1-134260N-11

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