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Browsing by Author "Aderhold, W."

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    Ultralow-resistivity CMOS contact scheme with pre-contact amorphization plus Ti (germano-)silicidation

    Yu, Hao  
    ;
    Schaekers, Marc  
    ;
    Hikavyy, Andriy  
    ;
    Rosseel, Erik  
    ;
    Peter, Antony  
    ;
    Hollar, K.
    ;
    Khaja, Fareen
    Proceedings paper
    2016, IEEE Symposium on VLSI Technology, 13/06/2016, p.66-67

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