Browsing by Author "Aderhold, Wolfgang"
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Publication Comprehensive study of Ga Activation in Si, SiGe and Ge and 5 x 10-10 $Xcm2 contact resistivity achieved on Ga doped Ge using nanosecond laser activation
Proceedings paper2017, IEEE International Electron Devices Meeting - IEDM, 2/12/2017, p.550-552Publication Low-resistance titanium contacts and thermally unstable nickel germanide contacts on p-type germanium
Journal article2016, IEEE Electron Device Letters, (37) 4, p.482-485Publication Sub-10-9 Ohm.cm2 contact resistivity on p-SiGe achieved by Ga doping and nanosecond laser activation
Proceedings paper2017, Symposium on VLSI Technology, 5/06/2017, p.214-215