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Sub-10-9 Ohm.cm2 contact resistivity on p-SiGe achieved by Ga doping and nanosecond laser activation
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1943 since deposited on 2021-10-24
Acq. date: 2025-10-23
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1943 since deposited on 2021-10-24
Acq. date: 2025-10-23
Citations