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Browsing by Author "Agua Borniquel, Jose"

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    Performance enhancement of PFET planar devices by plasma immersion ion implantation (P3i)

    Ortolland, Claude
    ;
    Horiguchi, Naoto  
    ;
    Kerner, Christoph  
    ;
    Chiarella, Thomas  
    ;
    Eyben, Pierre  
    Proceedings paper
    2008, 17th International Conference on Ion Implantation Technology - IIT, 8/06/2008, p.465-468

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