Performance enhancement of PFET planar devices by plasma immersion ion implantation (P3i)

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Author(s)

Ortolland, Claude

;

Horiguchi, Naoto

;

Kerner, Christoph

;

Chiarella, Thomas

;

;

Everaert, Jean-Luc

;

Agua Borniquel, Jose

;

;

Santhanam, Kartik

;

Porshnev, Peter

;

;

Schreutelkamp, Robert

;

Absil, Philippe

;

Vandervorst, Wilfried

;

;

Hoffmann, Thomas Y.

Metrics

1852 since deposited on 2021-10-17

Acq. date: 2025-10-23