Browsing by Author "Aguilera, L."

Now showing 1 - 2 of 2

Comparison of standard macroscopic and conductive atomic force microscopy leakage measurements on gate removed high-k capacitors

Polspoel, Wouter
;
Vandervorst, Wilfried
;
Aguilera, L.
;
Porti, M.
;
Nafria, M.
;
Aymerich, X.
Journal article
2009, Journal of Vacuum Science and Technology B, (27) 1, p.356-359
Nanoscale electrical characterization of HfO2/SiO2/MOS gate stackx with enhanced-CAFM

Nafria, M.
;
Blasco, X.
;
Porti, M.
;
Aguilera, L.
;
Aymerich, X.
;
Petry, Jasmine
Proceedings paper
2005, Spanish Conference on Electron Devices, 2/02/2005, p.65-68