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Browsing by Author "Ahmed, K.Z."

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    Further optimization of plasma nitridation of ultra-thin oxides for 65-nm node MOSFETS

    Kraus, P.A.
    ;
    Chua, T.C.
    ;
    Ahmed, K.Z.
    ;
    Campbell, J.
    ;
    Nouri, F.
    ;
    Cruise, J.
    ;
    Rothschild, Aude
    Journal article
    2004, Semiconductor Fabtech, 23, p.73-76

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