Publication:

Further optimization of plasma nitridation of ultra-thin oxides for 65-nm node MOSFETS

Date

2004
Journal article
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

18240.pdf 402.55 KB

Author(s)

Kraus, P.A.
;
Chua, T.C.
;
Ahmed, K.Z.
;
Campbell, J.
;
Nouri, F.
;
Cruise, J.
;
Rothschild, Aude
;
Veloso, Anabela  
;
Mertens, Sofie  
;
Schaekers, Marc  
;
Cubaynes, F.N.
;
Date, Lucien  
;
Schreutelkamp, Rob
;
Bauer, T.M.

Journal

Semiconductor Fabtech

Abstract

Description

Statistics

Views

2095 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2026-10-05

Citations

Statistics

Views

2095 since deposited on 2021-10-15
2last month
1last week
Acq. date: 2026-10-05

Citations