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Browsing by Author "Ahn, Jae Young"

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    A DRAM compatible Cu contact using self-aligned Ta-silicide and Ta-barrier

    Zhao, Chao
    ;
    Ahn, Jae Young
    ;
    Horiguchi, Naoto  
    ;
    Demuynck, Steven  
    ;
    Tokei, Zsolt  
    Journal article
    2008, Microelectronic Engineering, (85) 10, p.2009-2012

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