Browsing by Author "Aksenov, German"
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Publication Measurement and analysis of EUV photoresist related outgassing and contamination
Proceedings paper2009, Alternative Lithographic Technologies, 22/02/2009, p.727146Publication Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric
Proceedings paper2009, Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics, 14/04/2009, p.1156-D02-08