Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Conference contributions
Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric
Publication:
Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric
Date
2009
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Aksenov, German
;
De Roest, David
;
Verdonck, Patrick
;
Dultsev, F.N.
;
Marsik, Prema
;
Shamiryan, Denis
;
Arai, H
;
Takamura, N.
;
Baklanov, Mikhaïl
Journal
Abstract
Description
Metrics
Views
1874
since deposited on 2021-10-17
426
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1874
since deposited on 2021-10-17
426
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations