Publication:
Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric
Date
| dc.contributor.author | Aksenov, German | |
| dc.contributor.author | De Roest, David | |
| dc.contributor.author | Verdonck, Patrick | |
| dc.contributor.author | Dultsev, F.N. | |
| dc.contributor.author | Marsik, Prema | |
| dc.contributor.author | Shamiryan, Denis | |
| dc.contributor.author | Arai, H | |
| dc.contributor.author | Takamura, N. | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.imecauthor | De Roest, David | |
| dc.contributor.imecauthor | Verdonck, Patrick | |
| dc.contributor.orcidimec | Verdonck, Patrick::0000-0003-2454-0602 | |
| dc.date.accessioned | 2021-10-17T21:17:30Z | |
| dc.date.available | 2021-10-17T21:17:30Z | |
| dc.date.issued | 2009 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/14888 | |
| dc.source.beginpage | 1156-D02-08 | |
| dc.source.conference | Materials, Processes and Reliability for Advanced Interconnects for Micro- and Nanoelectronics | |
| dc.source.conferencedate | 14/04/2009 | |
| dc.source.conferencelocation | San Francisco, CA USA | |
| dc.title | Optimization of low-k UV curing: effect of wavelength on critical properties of the dielectric | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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