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Browsing by Author "Al-Bayati, A"

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    Integration of 50 nm half pitch single damascene copper trenches in BDII by means of double patterning 193 nm immersion lithography on metal hardmask

    Van Olmen, Jan  
    ;
    Al-Bayati, A
    ;
    Beyer, Gerald  
    ;
    Boelen, Pieter
    ;
    Carbonell, Laure
    ;
    Zhao, Chao
    Oral presentation
    2007, Advanced Metallization Conference - AMC

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