Browsing by Author "Alaerts, Carine"
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Publication Damascene integration feasability of porous SiLK resin films
Proceedings paper2002, Advanced Metallization Conference 2001, 9/10/2001, p.19-24Publication Dry etch and clean aspects for advanced integration of low k dielectrics
Oral presentation2000, 5th International Symposium on Low and High Dielectric Constant Materials: Materials Science, Processing, and Reliability IssuesPublication Dry etching of low-K materials
Proceedings paper1999, Proceedings of the IEEE International Interconnect Technology Conference - IITC; 24-26 May 1999; San Francisco, CA, USA., p.97-99Publication Integration feasibility of porous SiLK semiconductor dielectric
; ; Publication Plasma etching of organic low-dielectric-constant polymers: comparative analysis
Proceedings paper1998, Low Dielectric Constant Materials and Applications in Microelectronics IV, 14/04/1998, p.247-252Publication Post dry-etch cleaning issues of an organic low-K dielectric
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Post dry-etch cleaning issues of an organic low-K dielectric
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.89-92