Publication:

Damascene integration feasability of porous SiLK resin films

Date

2002

Proceedings Paper

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Author(s)

Waeterloos, Joost

;

Struyf, Herbert

;

Van Aelst, Joke

;

;

Caluwaerts, Rudy

;

Alaerts, Carine

;

Boullart, Werner

;

;

Van Hove, Marleen

;

Metrics

1970 since deposited on 2021-10-14

Acq. date: 2026-01-11