Publication:

Damascene integration feasability of porous SiLK resin films

Date

2002
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorWaeterloos, Joost
dc.contributor.authorStruyf, Herbert
dc.contributor.authorVan Aelst, Joke
dc.contributor.authorDas, Arabinda
dc.contributor.authorCaluwaerts, Rudy
dc.contributor.authorAlaerts, Carine
dc.contributor.authorBoullart, Werner
dc.contributor.authorTokei, Zsolt
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorMaex, Karen
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.imecauthorVan Aelst, Joke
dc.contributor.imecauthorCaluwaerts, Rudy
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.date.accessioned2021-10-14T23:58:40Z
dc.date.available2021-10-14T23:58:40Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7042
dc.source.beginpage19
dc.source.conferenceAdvanced Metallization Conference 2001
dc.source.conferencedate9/10/2001
dc.source.conferencelocationMontreal Canada
dc.source.endpage24
dc.title

Damascene integration feasability of porous SiLK resin films

dc.typeProceedings paper
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions