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Browsing by Author "Albright, R."

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    Publication

    SLM device for 193 nm lithographic applications

    Lauria, John
    ;
    Albright, R.
    ;
    Vladimirsky, O.
    ;
    Hoeks, M.
    ;
    Vanneer, R.
    ;
    van Drieenhuizen, B.
    ;
    Chen, L.
    Journal article
    2009, Microelectronic Engineering, (86) 4_6, p.569-572

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