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Browsing by Author "Alessandri, M."

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    Comparison of RCA and IMEC clean (HF last) type cleaning sequences in full production environment

    Wolke, K.
    ;
    Schenkl, M.
    ;
    Silvestre, P.
    ;
    Bellandi, E.
    ;
    Alessandri, M.
    ;
    Cornelissen, Ingrid  
    Proceedings paper
    1996, Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS, 23/09/1996, p.199-203

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