Publication:
Comparison of RCA and IMEC clean (HF last) type cleaning sequences in full production environment
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1980 since deposited on 2021-09-29
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Acq. date: 2026-09-14
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Statistics
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1980 since deposited on 2021-09-29
20last month
8last week
Acq. date: 2026-09-14
Citations