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Browsing by Author "Alety, S.R."

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    Chemical mechanical polishing of chemical vapor deposited Co films with minimal corrosion in the Cu/Co/Mn/SiCOH patterned structures

    Sagi, K.V.
    ;
    Teugels, Lieve  
    ;
    van der Veen, Marleen  
    ;
    Struyf, Herbert  
    ;
    Alety, S.R.
    ;
    Babu, S.V.
    Journal article
    2017, ECS Journal of Solid State Science and Technology, (6) 5, p.P276-P283

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