Browsing by Author "Alety, S.R."
Now showing 1 - 1 of 1
- Results per page
- Sort Options
Publication Chemical mechanical polishing of chemical vapor deposited Co films with minimal corrosion in the Cu/Co/Mn/SiCOH patterned structures
Journal article2017, ECS Journal of Solid State Science and Technology, (6) 5, p.P276-P283