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Chemical mechanical polishing of chemical vapor deposited Co films with minimal corrosion in the Cu/Co/Mn/SiCOH patterned structures
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1971 since deposited on 2021-10-24
Acq. date: 2025-12-08
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Views
1971 since deposited on 2021-10-24
Acq. date: 2025-12-08
Citations