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Browsing by Author "Alix, Cheryl"

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    Controlled isotropic etches for Gate-All-Around (GAA) device architectures

    Muraki, Yusuke  
    ;
    Oniki, Yusuke  
    ;
    Kenis, Karine  
    ;
    Altamirano Sanchez, Efrain  
    ;
    Holsteyns, Frank  
    Oral presentation
    2020, Surface Preparation and Cleaning Conference - SPCC

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