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Browsing by Author "Alvarez, A."

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    3D sequential low temperature top tier devices using dopant activation with excimer laser anneal and strained silicon as performance boosters

    Vandooren, Anne  
    ;
    Wu, Zhicheng  
    ;
    Parihar, Narendra  
    ;
    Franco, Jacopo  
    ;
    Parvais, Bertrand  
    Proceedings paper
    2020, IEEE Symposium on VLSI Technology and Circuits, JUN 15-19, 2020

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