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Publication:

3D sequential low temperature top tier devices using dopant activation with excimer laser anneal and strained silicon as performance boosters

Date

2020
Proceedings Paper
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Author(s)

Vandooren, Anne  
;
Wu, Zhicheng  
;
Parihar, Narendra  
;
Franco, Jacopo  
;
Parvais, Bertrand  
;
Matagne, Philippe  
;
Debruyn, Haroen  
;
Mannaert, Geert  
;
Devriendt, Katia  
;
Teugels, Lieve  
;
Vecchio, Emma  
;
Radisic, Dunja  
;
Rosseel, Erik  
;
Hikavyy, Andriy  
;
Chan, BT  
;
Waldron, Niamh  
;
Mitard, Jerome  
;
Besnard, G.
;
Alvarez, A.
;
Gaudin, G.
;
Schwarzenbach, W.
;
Radu, I.
;
Nguyen, B. Y.
;
Huet, K.
;
Tabata, T.
;
Mazzamuto, F.
;
Demuynck, Steven  
;
Boemmels, Juergen  
;
Collaert, Nadine  
;
Horiguchi, Naoto  

Journal

na

Abstract

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1980 since deposited on 2021-11-02
Acq. date: 2026-06-06

Citations

Statistics

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1980 since deposited on 2021-11-02
Acq. date: 2026-06-06

Citations

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