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Browsing by Author "Alvarez, C."

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    Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures

    Kluth, S.M.
    ;
    Alvarez, C.
    ;
    Trellenkamp, St.
    ;
    Moers, J.
    ;
    Mantl, S.
    ;
    Kretz, J.
    ;
    Vandervorst, Wilfried  
    Journal article
    2005, Journal of Vacuum Science & Technology B, (23) 1, p.76-79

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