Publication:
Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures
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1935 since deposited on 2021-10-16
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Acq. date: 2026-08-08
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1935 since deposited on 2021-10-16
1last month
1last week
Acq. date: 2026-08-08
Citations