Publication:
Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures
Date
| dc.contributor.author | Kluth, S.M. | |
| dc.contributor.author | Alvarez, C. | |
| dc.contributor.author | Trellenkamp, St. | |
| dc.contributor.author | Moers, J. | |
| dc.contributor.author | Mantl, S. | |
| dc.contributor.author | Kretz, J. | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-10-16T02:34:36Z | |
| dc.date.available | 2021-10-16T02:34:36Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10705 | |
| dc.source.beginpage | 76 | |
| dc.source.endpage | 79 | |
| dc.source.issue | 1 | |
| dc.source.journal | Journal of Vacuum Science & Technology B | |
| dc.source.volume | 23 | |
| dc.title | Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructures | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |