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Browsing by Author "An, Junyang"

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    Impact of PECVD-prepared interfacial Si and SiGe layers on epitaxial Si films grown by PECVD (200 degrees C) and APCVD (1130 degrees C)

    An, Junyang
    ;
    Maurice, Jean-Luc
    ;
    Roca i Cabarrocas, Pere
    ;
    Chen, Wanghua
    ;
    Depauw, Valerie  
    Journal article
    2021, APPLIED SURFACE SCIENCE, 546, p.149056

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