Browsing by Author "André, E."
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Publication Nanometer-scale roughness analysis of Si surfaces by TM-AFM for low-temperature epitaxy
Proceedings paper1995, ALTECH 95: Analytical Techniques for Semiconductor Materials and Process Characterization II. Proceedings of the Satellite Sympo, 28/09/1995, p.263-270Publication Si(100) epitaxy by low-temperature UHV-CVD: AFM study of the initial stages of growth
Journal article1995, Journal of Crystal Growth, (157) 1_4, p.161-167Publication Structural and dielectric properties of parylene-VT4 thin films
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