Browsing by Author "Anno, Yusuke"
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Publication Patterning developments in spin-on hard mask systems for 30nm half pitch EUV technology
Proceedings paper2012, Advances in Resist Materials and Processing Technology XXIX, 12/02/2012, p.832511Publication Roughness and variability in EUV lithography: Who is to blame? (Part 1)
Proceedings paper2013, Extreme Ultraviolet (EUV) Lithography IV, 24/02/2013, p.86792O