Publication:
Patterning developments in spin-on hard mask systems for 30nm half pitch EUV technology
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1886 since deposited on 2021-10-20
3last month
Acq. date: 2025-12-10
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Metrics
Views
1886 since deposited on 2021-10-20
3last month
Acq. date: 2025-12-10
Citations