Browsing by Author "Arad, Shahar"
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Publication Unbiased roughness measurements for 0.55NA EUV material setup
;Mathew, Bobin ;Arad, Shahar ;Brand, Omri ;Frank, Tal ;Alkoken, Ran ;Shilo, YaelMelamed, YardenProceedings paper2023, Conference on Metrology, Inspection, and Process Control XXXVII, FEB 27-MAR 02, 2023, p.Art. 1249607