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Browsing by Author "Archer, Leo"

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    Publication

    Selective single-wafer wet etching of Hf-based layers

    Snow, Jim
    ;
    Kraus, Harald
    ;
    Kovacs, Fredi
    ;
    Claes, Martine  
    ;
    Paraschiv, Vasile  
    ;
    Vos, Rita  
    Journal article
    2005, Semiconductor Fabtech, 28, p.115-120

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