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Articles
Selective single-wafer wet etching of Hf-based layers
Publication:
Selective single-wafer wet etching of Hf-based layers
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Date
2005
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Snow, Jim
;
Kraus, Harald
;
Kovacs, Fredi
;
Claes, Martine
;
Paraschiv, Vasile
;
Vos, Rita
;
Mertens, Paul
;
De Gendt, Stefan
;
Heyns, Marc
;
Archer, Leo
Journal
Semiconductor Fabtech
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1959
since deposited on 2021-10-16
1
last month
Acq. date: 2026-01-26
Citations
Statistics
Views
1959
since deposited on 2021-10-16
1
last month
Acq. date: 2026-01-26
Citations