Browsing by Author "Aresti, Maitane"

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The influence of N containing plasmas on low-k films

Verdonck, Patrick
;
Aresti, Maitane
;
Ferchichi, Abdelkarim
;
Van Besien, Els
;
Stafford, Ben
Journal article
2011, Microelectronic Engineering, (88) 5, p.627-630
The influence of N containing plasmas on low-k films

Verdonck, Patrick
;
Aresti, Maitane
;
Ferchichi, Abdelkarim
;
Van Besien, Els
;
Stafford, Ben
Oral presentation
2010, Materials for Advanced Metalliization Conference - MAM