Browsing by Author "Arleo, Paul"
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Publication Discovering practical use of sensor wafers in CCP reactors
Proceedings paper2011, China Semiconductor Technology International Conference - CSTIC, 13/03/2011, p.409-414Publication On characterization of etch processes in TCP reactor with PlasmaVolt X2 sensor wafer
Meeting abstract2010, 3rd International Plasma Etch and Strip in Microelectronics Workshop - PESM, 4/03/2010Publication Sensor wafers in modern plasma etching technology
Meeting abstract2009, 2nd International Plasma Etch and Strip in Microelectronics Workshop - PESM, 26/02/2009Publication Study on metrology of ERU tuning in TCP reactor using PVx2 sensor wafer
Proceedings paper2010, IEEE/SEMI Advanced Semiconductor Manufacturing Conference - ASMC, 11/07/2010, p.34-38Publication Temperature and RF current sensor wafers for plasma etching
Journal article2012, Journal of the Electrochemical Society, (159) 1, p.H5-H10