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Browsing by Author "Armeanu, Ana"

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    Exploring alternative EUV mask absorber for iN5 self-aligned block and contact layers

    Sejpal, Rajiv
    ;
    Philipsen, Vicky  
    ;
    Armeanu, Ana
    ;
    Wei, Chi-I
    ;
    Gillijns, Werner  
    ;
    Lafferty, Neal
    Proceedings paper
    2019, Photomask Technology 2019, 16/09/2019, p.111481B

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